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Optical Microsystems
CMST
is creating solutions for the photonics packaging challenges in
datacom,
telecom and sensing. We are developing technologies to facilitate
interfacing of photonic integrated circuits both optically (integration of
optical coupling structures and optical redistribution layers based on
polymer waveguides) and electrically (integration of drivers).
In addition, CMST has built up a technology platform allowing photonics integration of optical waveguides, coupling structures, light sources, detectors, and electronic circuitry on rigid, flexible, and stretchable substrates targeting a variety of medical or optical sensing-related applications. Together with our partners, we are particularly working towards soft and flexible waveguide probes for optogenetics or other light-based therapies and flexible wearable photonic patches with miniature lasers and detectors for medical diagnostics.
Laser technology has since long been an important competence, and the group has several laser systems at its disposal: a KrF Excimer laser, ND YAG laser and CO2 laser for drilling microvias and structuring materials and a picosecond and femtosecond laser for advanced material processing and glass modification. Using the femtosecond laser, we realize optical waveguides, sensors and microchannels using direct writing in glass for applications in photonics packaging and sensing. Based on the picosecond laser, we develop technologies for laser transfer printing of chiplets for high-speed precision assembly.
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Selection of recent work :
Biomedical optics: stimulation and detection
Optogenetics: measuring brain temperature increase upon illumination
We measured (using a Fiber Bragg Grating sensor) and simulated the increase in brain temperature upon illumination with blue light at different irradiance values.
Acharya, Anirudh R., Bram Vandekerckhove, Lars Emil Larsen, Jean Delbeke,
Wytse J. Wadman, Kristl Vonck, Evelien Carette, Alfred Meurs, Jan
Vanfleteren, Paul Boon, Jeroen Missinne, and Robrecht Raedt. 2021. “In Vivo
Blue Light Illumination for Optogenetic Inhibition: Effect on Local
Temperature and Excitability of the Rat Hippocampus.” JOURNAL
OF NEURAL ENGINEERING 18
(6). doi:10.1088/1741-2552/ac3ef4.
Review paper: Technological challenges in the development of optogenetic closed-loop therapy approaches in epilepsy and related network disorders of the brain
We reviewed and summarized the technological Challenges in the Development of Optogenetic Closed-Loop Therapy Approaches in Epilepsy and Related Network Disorders of the Brain.
Vandekerckhove, Bram, Jeroen Missinne, Kristl Vonck, Pieter Bauwens, Rik
Verplancke, Paul Boon, Robrecht Raedt, and Jan Vanfleteren. 2021. “Technological
Challenges in the Development of Optogenetic Closed-Loop Therapy Approaches in
Epilepsy and Related Network Disorders of the Brain.” MICROMACHINES 12
(1). doi:10.3390/mi12010038.
3D photonic and mechanical microstructures in glass using femtosecond-laser inscription
Low-loss single mode waveguides, Bragg grating sensors and precision alignment features and devices:
Laser Written Glass
Interposer for Fiber Coupling to Silicon Photonic Integrated Circuits.
"A. Desmet, A. Radosavljević, J. Missinne, D. Van Thourhout and G. Van
Steenberge, "Laser Written Glass Interposer for Fiber Coupling to Silicon
Photonic Integrated Circuits," in IEEE Photonics Journal, vol. 13, no. 1,
pp. 1-12, Feb. 2021, doi: 10.1109/JPHOT.2020.3039900."
Femtosecond laser-inscribed
non-volatile integrated optical switch in fused silica based on
microfluidics-controlled total internal reflection.
“Radosavljevic
A, Desmet A, Missinne J, Saurav K, Panapakkam V, Tuccio S, et al.
Femtosecond laser-inscribed non-volatile integrated optical switch in fused
silica based on microfluidics-controlled total internal reflection. JOURNAL
OF LIGHTWAVE TECHNOLOGY. 2020;38(15):3965–73.”
Mechanical microstructures for MEMS-like optical sensors:
Temperature compensated strain sensor established with our laser micromachined 3D glass photonics platform.
“Geudens,
Viktor, Shahryar Nategh, Geert Van Steenberge, Jan Belis, and Jeroen
Missinne. 2024. “Laser Micromachined 3D Glass Photonics Platform
Demonstrated by Temperature Compensated Strain Sensor.” OPTICS
AND LASER TECHNOLOGY 169.
doi:10.1016/j.optlastec.2023.109970.”
Electro-photonic packaging and integration
Aerosol-jet printed (AJP) high-speed chip-to-chip interconnects
Aerosol-Jet printed interconnects for 60-Gb/s
CMOS driver and microring modulator transmitter assembly.
“Elmogi, A., Ramon, H., Lambrecht, J., Ossieur, P., Torfs, G., Missinne, J., De Heyn, P., et al. (2018).
IEEE Photonics Technology Letters, 30(22), 1944–1947.”
Aerosol-jet printed interconnects for 2.5 D electronic
and photonic integration.
“Elmogi, A., Soenen, W., Ramon, H., Yin, X., Missinne, J., Spiga, S., Amann,
M.-C., et al. (2018). JOURNAL OF LIGHTWAVE TECHNOLOGY, 36(16), 3528–3533.”
Flip-chip bonding of vertical-cavity surface-emitting
lasers using laser-induced forward transfer.
“Kaur K, Missinne J, Van Steenberge G. APPLIED PHYSICS LETTERS. 2014;104(6).”
Flip-chip assembly of VCSELs to silicon grating couplers
via laser fabricated SU8 prisms.
“Kaur K, Subramanian A, Cardile P, Verplancke R, Van Kerrebrouck J, Spiga S, et al. OPTICS EXPRESS.
2015;23(22):28264–70.”
Photonic packaging
Monolithically integrated silicon microlenses for efficient and alignment-tolerant coupling from/to photonic chips
Alignment-tolerant
Interfacing of a Photonic Integrated Circuit Using Back Side Etched Silicon
Microlenses.
“Missinne, J., Beneitez, N. T., Mangal, N., Zhang, J., Vasiliev, A., Van Campenhout, J., Snyder, B., Roelkens, G.,
and Van Steenberge, G., Alignment-tolerant interfacing of a photonic integrated circuit using back-side
etched silicon microlenses, in Silicon Photonics XIV, 10923, International Society for
Optics and Photonics (2019).”
Monolithic Integration of Microlenses on the Backside of a Silicon Photonics Chip for Expanded Beam Coupling
“Mangal,
Nivesh, Bradley Snyder, Joris Van Campenhout, Geert Van Steenberge, and
Jeroen Missinne. 2021. “Monolithic Integration of Microlenses on the
Backside of a Silicon Photonics Chip for Expanded Beam Coupling.” OPTICS
EXPRESS 29
(5): 7601–7615. doi:10.1364/oe.412353.”
Expanded-Beam Backside Coupling Interface for Alignment-Tolerant Packaging of Silicon Photonics
“Mangal,
Nivesh, Bradley Snyder, Joris Van Campenhout, Geert Van Steenberge, and
Jeroen Missinne. 2020. “Expanded-Beam Backside Coupling Interface for
Alignment-Tolerant Packaging of Silicon Photonics.” IEEE
JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS 26
(2). doi:10.1109/jstqe.2019.2934161.”
Back-side emitted grating
couplers for use with monolithically integrated microlenses
Mangal N, Missinne J, Van Steenberge G, Van Campenhout J, Snyder B.
Performance evaluation of backside emitting O-Band grating couplers for 100
μm-thick silicon photonics interposers. IEEE PHOTONICS JOURNAL . Institute
of Electrical and Electronics Engineers (IEEE); 2019;11(3):1–1.
Compact Packaged Silicon Photonic Bragg Grating Sensor Based on a Ball Lens Interface.
Missinne, Jeroen, Viktor Geudens, Steven Van Put, Giannis Poulopoulos, Michal
Szaj, Charalampos Zervos, Hercules Avramopoulos, and Geert Van Steenberge. 2023.
“Compact Packaged Silicon Photonic Bragg Grating Sensor Based on a Ball Lens
Interface.” OPTICS
AND LASER TECHNOLOGY 157.
doi:10.1016/j.optlastec.2022.108768.
Single-mode polymer optical waveguides (down to 1x1 μm2) on large-area substrates using mask lithography, laser-direct write technology or imprinting.
Single-mode polymer optical waveguides
using laser-direct write technology
“Elmogi, A., Bosman, E., Missinne, J., & Van Steenberge, G. (2016). Comparison of epoxy- and
siloxane-based single-mode optical waveguides defined by direct-write lithography.
OPTICAL MATERIALS, 52, 26–31.”
Single-mode polymer optical
waveguides using imprinting (for sensing)
“Missinne, Jeroen, Nuria Teigell Beneitez, Marie-Aline Mattelin, Alfredo Lamberti, Geert Luyckx, Wim Van Paepegem,
and Geert Van Steenberge. 2018. Sensors 18 (8): 2717–1–2717–14.”
Flexible photonics for sensing and biomedical applications
Embedding of VCSEL and photodiode chips in ultra-thin polymer packages.
Ultrathin optoelectronic device packaging in flexible carriers.
“Bosman, E., Missinne, J., Van Hoe, B., Van Steenberge, G., Kalathimekkad,
S., Van Erps, J., Milenkov, I., et al. (2011). IEEE JOURNAL
OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 17(3), 617–628.”
Stretchable optical waveguide demonstrator including
embedded VCSELs and photodiodes integrated with PDMS multimode waveguides.
“Missinne, J., Kalathimekkad, S., Van Hoe, B., Bosman, E., Vanfleteren, J., & Van Steenberge, G. (2014).
Stretchable optical waveguides. OPTICS EXPRESS, 22(4), 4168–4179.”
Bragg-Grating-Based Photonic Strain and Temperature Sensor
Foils Realized Using Imprinting and Operating at Very Near Infrared Wavelengths.
“Missinne, Jeroen, Nuria Teigell Beneitez, Marie-Aline Mattelin, Alfredo Lamberti, Geert Luyckx, Wim Van Paepegem,
and Geert Van Steenberge. 2018. Sensors 18 (8): 2717–1–2717–14.”
Thin and Flexible Polymer Photonic Sensor Foils for Monitoring Composite Structures.
“Missinne, Jeroen, Nuria Teigell Beneitez, Alfredo Lamberti, Gabriele Chiesura, Geert Luyckx, Marie-Aline Mattelin, Wim Van Paepegem,
and Geert Van Steenberge. 2018. Advanced Engineering Materials 20 (2).”
Nanofabrication
Fine-pitch gratings: master fabrication and imprinting (e.g. for sensing or augmented reality).
Design and fabrication
of blazed gratings for a waveguide-type head mounted display.
"Mattelin, M.-A., Radosavljevic, A., Missinne, J., Cuypers, D., & Van
Steenberge, G. (2020). OPTICS EXPRESS, 28(8),
11175–11190. https://doi.org/10.1364/oe.384806"
Imprinted
polymer-based guided mode resonance grating strain sensors.
Mattelin, M.-A., Missinne, J., De Coensel, B., & Van Steenberge, G. (2020). SENSORS, 20(11).
https://doi.org/10.3390/s20113221